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Plasma etching
Results: 62

#	Item
21	Removal of Hydrogenated Carbon from W-C Deposits by Microwave Oxygen Plasma Alenka Vesel, Miran Mozetič, Peter Panjan, Aleksander Drenik Jožef Stefan Institute Jamova cesta 39, SI-1000 Ljubljana, Slovenia alenka.vesel@ Add to Reading List Source URL: www.djs.si Language: English - Date: 2012-07-16 15:39:30 Semiconductor device fabrication Tungsten compounds Nonmetals Coatings Oxide Etching Tungsten Sputtering Sputter deposition Chemistry Matter Chemical elements
22	RECOVERY OF AGED ANODE WIRES IN PROPORTIONAL COUNTERS USING A NEGATIVE CORONA DISCHARGE IN 80 % CF4 + 20 % CO2 G.E. Gavrilov, A.G. Krivshich, D.A. Maysuzenko, A.A. Fetisov, N.Yu. Shvetsova 1. Introduction During last few Add to Reading List Source URL: hepd.pnpi.spb.ru Language: English - Date: 2015-04-18 12:21:58 Electrical discharge in gases Semiconductor device fabrication Plasma processing Gas discharge lamps Plasma physics Corona discharge Plasma etching Plasma Electric glow discharge Physics Chemistry Electromagnetism
23	IonEtch Sputter Ion Gun, GenII The tectra IonEtch ion gun is a filamentless ion source based on a microwave plasma discharge. The IonEtch works by coupling microwave energy into a coaxial waveguide and from there via eva Add to Reading List Source URL: www.tectra.de Language: English - Date: 2010-10-02 06:51:58 Ions Matter Semiconductor device fabrication Plasma physics Ion source Plasma Reactive-ion etching Ion gun Sputtering Chemistry Physics Plasma processing
24	CALIFORNIA STATE SCIENCE FAIR 2015 PROJECT SUMMARY Name(s) Project Number Add to Reading List Source URL: www.usc.edu Language: English - Date: 2015-04-09 21:01:16 Semiconductor device fabrication Superhydrophobe Microtechnology Hydrophobe Etching Plasma etching Chemistry Chemical properties Intermolecular forces
25	NANOELECTRONICS FABRICATION FACILITY (NFF), HKUST Standard Operating Manual ___________________________________________________________ Oxford Plasmalab 80 Plus Plasma Etcher Add to Reading List Source URL: mfz140.ust.hk Language: English - Date: 2014-07-23 02:45:21 Microtechnology Technology Physics Reactive-ion etching Plasma etching Plasma etcher Dry etching Etching Deep reactive-ion etching Semiconductor device fabrication Materials science Plasma processing
26	MUEGGE_Poster_MEMS-Stripping-Technology-Tool_Rev00 Add to Reading List Source URL: www.muegge.de Language: English - Date: 2015-01-07 04:55:26 Technology Physics Plasma processing Etching Plasma etching Microelectromechanical systems Dry etching Plasma Microwave Semiconductor device fabrication Materials science Microtechnology
27	TIME-MULTIPLEXED-PLASMA-ETCHING OF HIGH NUMERICAL APERTURE PARABOLOIDAL MICROMIRROR ARRAYS Kerwin Wang, Karl F. Böhringer Electrical Engineering Department, University of Washington Seattle, WA[removed]Phone[removed] Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2003-07-09 02:25:14 Technology Micro-Opto-Electro-Mechanical Systems Etching Mirror Deep reactive-ion etching Plasma Microlens Dry etching Reactive-ion etching Microtechnology Materials science Semiconductor device fabrication
28	Hindawi Publishing Corporation Journal of Nanomaterials Volume 2013, Article ID[removed], 6 pages http://dx.doi.org[removed][removed]Review Article Add to Reading List Source URL: downloads.hindawi.com Language: English - Date: 2014-08-28 12:52:18 Physics Microtechnology Plasma processing Spectroscopy Nanotechnology Etching Dry etching Reactive-ion etching Polymer Semiconductor device fabrication Chemistry Materials science
29	Molecular Devices: A Potential Replacement for Semiconductors Anthony Moeller NIST Semiconductor Electronics Division July 27, 2004 Add to Reading List Source URL: spsnational.org Language: English - Date: 2006-11-14 11:17:28 Technology Plasma processing Etching Reactive-ion etching Wafer Photolithography Chemical vapor deposition Microelectromechanical systems Semiconductor device fabrication Materials science Microtechnology
30	A new low-temperature high-aspect-ratio MEMS process using plasma activated wafer bonding Add to Reading List Source URL: deepblue.lib.umich.edu Language: English - Date: 2013-09-17 15:11:17 Technology Microelectromechanical systems Etching Wafer Microfabrication Deep reactive-ion etching Chemical-mechanical planarization Thermal oxidation Silicon on insulator Semiconductor device fabrication Materials science Microtechnology

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